| 摘要 |
PROBLEM TO BE SOLVED: To provide a support structure of a piezoelectric vibrator capable of suppressing a vibration leak resulting from supporting of the piezoelectric vibrator. SOLUTION: The support structure of the piezoelectric vibrator 10 supports the piezoelectric vibrator 10 which induces bending vibrations to a fixed member, and includes a substrate 20, a lower electrode 30 formed on one main surface of the substrate 20, a piezoelectric body 40 formed on a surface of the lower electrode 30, an upper electrode 50 formed on a surface of the piezoelectric body 40, support beams 31 and 32 which are extended outward from the lower electrode 30 nearby node parts 61 and 62 of the bending vibrations of the piezoelectric vibrator 10, and support beams 51 and 52 which are extended from the upper electrode 50 to outward opposite to the support beams 31 and 32 nearby the node parts 61 and 62 of the bending vibrations of the piezoelectric vibrator 10. Further, the lower electrode 30 is formed on a neutral plane 60 of the bending vibrations. COPYRIGHT: (C)2008,JPO&INPIT
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