| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device and a dislocation correction method of the charged particle beam device in which the dislocation amount data corresponding to kinds of WD can be obtained easily. SOLUTION: The charged particle beam device scans charged particle beams on a sample 4 and obtains an observation image based on scanning, and is provided with a storage means 20b which stores information on dislocation amount or dislocation correction amount of the observation image to scanning speed and working distance of the charged particle beams and a processing means 20a which outputs a correction value to express the dislocation amount or dislocation correction amount of the observation image in the scanning speed and the working distance at the time of observation based on the information stored in the storage means 20b. The charged particle beam scanning signal is corrected based on the correction value from the processing means 20a. COPYRIGHT: (C)2008,JPO&INPIT
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