| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure control valve capable of effectively adjusting temperature on a diaphragm. SOLUTION: The pressure control valve comprises a valve case 80 having a primary flow passage 101, a secondary flow passage 102, and a valve seat 83 for separating these flow passages 101 and 102; and forming an opening 84, a valve body 94 for opening and shutting the opening 84 by separating from and seating on the valve seat 83, the first diaphragm 91 which is arranged at the opposite side of the secondary flow passage 102 and separates the valve body 94 from the valve seat 83 or seats the valve body 94 on the valve seat 83, the second diaphragm 92 arranged on a side opposite to the secondary flow passage 102 of the first diaphragm 91, and a liquid flow passage 104 in which a liquid L for temperature adjustment is circulated between the diaphragms 91 and 92. COPYRIGHT: (C)2008,JPO&INPIT
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