| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of preventing sedimentation of a product material, even when a rotating speed is low. SOLUTION: This turbo-molecular pump controls the pump temperature in the target temperature by heating a pump body 1 by a heater 29. A target temperature setting part 8 sets the target temperature to the predetermined temperature when the rotating speed of a rotary body 4 is a predetermined rotating speed. Since the target temperature is set to the higher temperature than the predetermined temperature when the rotating speed of the rotary body 4 is lower than the predetermined rotating speed, the sedimentation of the product material can be prevented even when the rotating speed is low. Since the pump temperature is controlled in the target temperature set by the target temperature setting part 8 even when stopping rotation of the rotary body 4, the rotary body 4 can be prevented from becoming rotatably undrivable by being fixed to sediment. COPYRIGHT: (C)2008,JPO&INPIT
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