发明名称 |
Microfabricated pressure and shear stress sensors |
摘要 |
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
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申请公布号 |
US2008022778(A1) |
申请公布日期 |
2008.01.31 |
申请号 |
US20070880134 |
申请日期 |
2007.07.20 |
申请人 |
LIU CHANG;CHEN JACK;ENGEL JONATHAN |
发明人 |
LIU CHANG;CHEN JACK;ENGEL JONATHAN |
分类号 |
G01L9/04;G01F1/28;G01F1/684;G01K7/01;G01K7/18;G01L5/22;G01L19/00;G01N3/06;G01N3/24;G01P5/12 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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