| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow rate sensor for inhibit an air flow from entering the backside of a diaphragm, inhibiting a pressure difference from being generated between a surface and a backside of the diaphragm, and accurately measuring a flow rate. <P>SOLUTION: The thermal flow rate sensor includes a substrate 6; the diaphragm 2 held on the substrate 6; resistors 3a, 3b, 3c disposed in the diaphragm 2; a cavity 7 formed on the substrate 6 disposed on the backside of the diaphragm 2; an opening opened on the surface and exposed to a fluid to be measured; and a communication path for communicating the opening and the cavity. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
