| 摘要 |
PROBLEM TO BE SOLVED: To seal a gap between micro-protrusions uniformly with a simple structure. SOLUTION: A terminal formation face of a workpiece W is supplied with a liquefied coating material 7, and the corresponding workpiece W is carried into a pressure stage 9 and is pressured by a pressure plate 11 coated with a release film 10. The release film 10 is still stuck to the workpiece W while the workpiece W is carried into a cooling stage, and in a state that it is frozen at a given temperature. The release film 10 is peeled off therefrom. Then, the workpiece W is heated at a heating stage to harden the liquefied coating material 7. COPYRIGHT: (C)2008,JPO&INPIT
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