发明名称 POSITION DETECTING APPARATUS, POSITION DETECTING METHOD, INSPECTING APPARATUS, POSITION DETECTING PROGRAM AND COMPUTER READABLE RECORDING MEDIUM
摘要 <p>Provided is an inspecting apparatus which can detect a luminescent point defect even when the luminescent point defect exists on an alignment mark portion. A position detecting apparatus arranged in the inspecting apparatus is also provided. A liquid crystal panel module (11) is provided with a control section (7) for lighting an alignment mark, which is arranged for position detection, at a luminance difficult to be viewed, and an image processing section (6) for detecting the position of a display panel based on the picked up image of the display panel whereupon the alignment mark is lighted.</p>
申请公布号 WO2008013137(A1) 申请公布日期 2008.01.31
申请号 WO2007JP64425 申请日期 2007.07.23
申请人 SHARP KABUSHIKI KAISHA;YASUKAWA, MINORU 发明人 YASUKAWA, MINORU
分类号 G01N21/88;G01B11/00;G02F1/13 主分类号 G01N21/88
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