| 摘要 |
PROBLEM TO BE SOLVED: To construct a sensor structure, by which difficulties in sensor installation for acquiring a highly accurate output is solved and sensor outputs in a plurality of directions can be acquired by a single sensor, for providing a high-speed response sensor capable of responding to high-speed acceleration change. SOLUTION: The acceleration sensor is constructed of a first conductive substrate 1 and a second conductive substrate 15 layered on the first conductive substrate 1 via an insulation layer 2. The acceleration sensor is provided with a detection element 3 formed of at least either of the first conductive substrate 1 and the second conductive substrate 15 and moved by application of an external force, a plurality of beams 8-11 holding the detection element 3 onto the second conductive substrate 15, electrostatic capacity generation parts 4-7 varying electrostatic capacity according to movement of the detection element 3, and electrode parts 16-20 outputting change in the electrostatic capacity. COPYRIGHT: (C)2008,JPO&INPIT
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