| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reliable, modular, production-quality narrow-band high repetition-rate F<SB>2</SB>laser. <P>SOLUTION: A reliable, modular, production-quality excimer laser capable of producing 10 mJ laser pulses in the range of 1,000 Hz to 2,000 Hz or greater is provided. Replaceable modules include a laser chamber, a pulse power system including three modules, an optical resonator comprised of a line narrowing module and an output coupler module, a wavemeter module, an electrical control module, a cooling water module, and a gas control module. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
