| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for an electro-optical device that can reduce contact resistance between wiring and a source-drain region without the need of a new photomask, and to provide an electro-optical device, an electronic apparatus, and a method for manufacturing a substrate for an electro-optical device. SOLUTION: The liquid crystal display device 100a has a TFT substrate 10a and a counter substrate 20a. TFT elements 30 and data lines 6a are formed on the TFT substrate 10a. A titanium silicide layer is formed on a portion in contact with the data line 6a of a high concentration source region 1d of the TFT element 30. Also a titanium silicide layer is formed on a portion in contact with a relay layer 6a1 for a shield layer of a capacitor electrode 300, and on a portion in contact with a second relay electrode 6a2 of a relay electrode 719 . Thereby, contact resistance can be decreased. COPYRIGHT: (C)2008,JPO&INPIT |
