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发明名称
QUICK AND ACCURATE MODELING OF TRANSMITTED FIELD
摘要
Systems and techniques to quickly and accurately model a transmitted electromagnetic field through a mask, to design a mask, and to create a library of corrections including edge corrections, edge-to-edge corrections, and corner corrections.
申请公布号
US2008028358(A1)
申请公布日期
2008.01.31
申请号
US20070866944
申请日期
2007.10.03
申请人
INTEL CORPORATION
发明人
LIU PENG;SINGH VIVEK
分类号
G06F17/50;G03C5/00;G03F9/00;H01L21/76
主分类号
G06F17/50
代理机构
代理人
主权项
地址
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