Wiring substrate for pressure sensors, acceleration sensors and ultrasonic sensors, comprises electrode cushion pad, which is arranged in opening, formed in protection insulation film

摘要

The wiring substrate has a wiring layer (15) formed on the surface of a silicon substrate (11), another wiring layer (16) formed on the surface of the former wiring layer. A protection insulation film (14) is so formed that it covers the latter wiring layer. An opening (14a) is formed in the protection insulation film, and an electrode cushion pad is arranged in the opening. The opening in the protection insulation film and the former wiring layer are formed at such positions that they do not overlap each other toward the card thickness of the substrate.