| 摘要 |
A micro-actuator used in HGA of the disk drive unit is provided. The micro-actuator comprises a metal frame which includes a base piece and two opposite arms extending from the base piece, in which at least two pieces of thin film PZT are attached to the side surface(s) of each one of said two opposite arms respectively in such a manner that the displacement of each arm is increased due to the superposition effect when each arm displaces together with the thin film PZT attached thereon in response to drive signal(s) applied to the thin film PZT. Since at least two pieces of thin film PZT are attached on the side surface(s) of each arm, an increased displacement of the arms can be achieved due to the superposition effect. |
