发明名称 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
摘要 A piezoelectric/electrostrictive device (10) comprises a pair of mutually opposing thin plate sections (16a, 16b), a movable section (20), and a fixation section (22) for supporting the thin plate sections (16a, 16b) and the movable section (20); a piezoelectric/electrostrictive element (24a, 24b) arranged on at least one thin plate section (16a, 16b) of the pair of thin plate sections (16a, 16b); and a hole (12) formed by both inner walls of the pair of thin plate sections (16a, 16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixation section (22), wherein a central portion of the movable section (20) is cut off to form mutually opposing end surfaces (36a, 36b) in the movable section (20). <IMAGE>
申请公布号 DE60034642(T2) 申请公布日期 2008.01.31
申请号 DE2000634642T 申请日期 2000.09.29
申请人 NGK INSULATORS LTD. 发明人 TAKEUCHI, YUKIHISA;NANATAKI, TSUTOMU;IKEDA, KOJI;KIMURA, KOJI;SHIBATA, KAZUYOSHI
分类号 H01L41/08;H01L41/09;H01L41/27;H01L41/39;H02N2/00 主分类号 H01L41/08
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