Bearbeitungsverbund für ein Substrat

摘要

Composite comprises a substrate, especially a thin substrate (2) with a thickness of less than 0.3 mm, and a support substrate (1) connected at least indirectly to the substrate. A spacer layer (3) with recesses is arranged between the substrate and support substrate. The recesses are provided at least in the surface of the spacer layer facing the substrate. - An INDEPENDENT CLAIM is also included for a process for treating, processing and/or transporting a substrate, especially a thin substrate with a thickness of less than 0.3 mm. Preferred Features: The spacer layer is made of a plastic, polymer or glass, or a material containing a plastic, polymer or glass. The support substrate is made of glass or a material containing glass.