| 摘要 |
An XY stage is provided to install upper shaft location compensating units measuring and storing deviation from an axial direction straight line to compensate location of an upper slider with high accuracy. A lower shaft motor has a lower shaft slider arranged in an X-axial direction or a Y-axial direction, and of which location is controlled in the corresponding axial direction. An upper shaft motor(20) has upper shaft sliders(21,22,23) mounted on the lower shaft slider in an X-axial direction or a Y-axial direction, and of which location is controlled in the corresponding axial direction. A lower shaft driver and upper shaft drivers(41,42,43) control location of the lower shaft slider and the upper shaft sliders. Upper shaft location compensating units measure and store deviation in a direction orthogonal to an axial direction straight line correspondingly to axial direction location of the lower shaft slider. The upper shaft drivers read the deviation from the upper shaft location compensating units for compensating location of the upper shaft sliders based on location information of the lower shaft slider. |
