ELECTRON MICROSCOPE, ELECTRON BEAM HOLOGRAM FORMING METHOD, AND PHASE REPRODUCED IMAGE FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To enable to obtain electric field information derived from an electric field originating from a sample. SOLUTION: In an electron microscope provided with electron beam bi-prisms, a microprobe 15 to shield an electron beam is installed between an electron gun 1 of the microscope and a holder to hold the sample 11. The microprobe 15 is to be movable in up-and-down and back-and-forth directions. Furthermore, a shield wall to shield an electromagnetic wave from the sample 11 is installed in a reference wave. COPYRIGHT: (C)2008,JPO&INPIT