| 摘要 |
A surface inspection apparatus comprises a radiation mechanism for radiating a light beam to the surface of an object having an edge of a non-flat surface (for example, a rounded edge) or an edge of an inclined surface, a scanning mechanism for moving the object relative to a radiation position of the light beam for scanning, and a detector for detecting light scattered from the object, and further includes the following characteristic. The scanning mechanism, when the light beam for scanning is radiated to the edge of the object, is configured to move the object in the direction that increases an incident angle of the light beam with a normal to the surface of the edge as the objection moves relative to a radiation position of the light beam.
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