DRY EACHING DEVICE WITH POLYGONAL SCANNER AND GALVANOMETER SCANNER

摘要

A dry etching device with a polygonal scanner and a galvanometer scanner is provided to control an angle of light incident into the polygonal scanner by minutely controlling the light. A light source(100) generates light. A polygonal scanner has plural reflective surfaces for reflecting the light generated from the light source. A spindle motor rotates the polygonal scanner. An optical unit guides the light reflected from the reflecting surfaces of the polygonal scanner to a substrate. A light path recognizing unit is comprised of a first light receiving unit(108) and a second light receiving unit(109). The first light receiving unit receives the light having an initial light path of effective light paths of the light reflected from the reflecting surfaces of the polygonal scanner. The second light receiving unit receives the light having a final light path of the effective light routes of the light reflected from the reflecting surfaces of the polygonal scanner. A controlling unit(110) is synchronized by a synchronizing signal from the light path recognizing unit to control flickering of the light source. A pattern information source(120) provides pattern information with respect to a pattern to be formed on the substrate to the controlling unit. A galvanometer scanner controls the light path to induce the light to the polygonal scanner by reflecting the light generated from the light source.