发明名称 |
Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers |
摘要 |
An improved vapor-phase deposition method and apparatus for the application of multilayered films/coatings on substrates is described. The method is used to deposit multilayered coatings where the thickness of an oxide-based layer in direct contact with a substrate is controlled as a function of the chemical composition of the substrate, whereby a subsequently deposited layer bonds better to the oxide-based layer. The improved method is used to deposit multilayered coatings where an oxide-based layer is deposited directly over a substrate and a SAM organic-based is directly deposited over the oxide-based layer. Typically a series of alternating layers of oxide-based layer and organic-based layer are applied.
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申请公布号 |
US2008026146(A1) |
申请公布日期 |
2008.01.31 |
申请号 |
US20070906071 |
申请日期 |
2007.09.28 |
申请人 |
APPLIED MICROSTRCTURES, INC. |
发明人 |
KOBRIN BORIS;CHINN JEFFREY D.;NOWAK ROMUALD;YI RICHARD C. |
分类号 |
C23C16/44;B05D3/14;B05D7/00;B05D7/24;B21D39/00;B32B9/00;B32B15/04;C23C16/00;C23C16/02;C23C16/40;C23C16/448;C23C16/455;C23C16/56 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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