发明名称 Method of producing thin film magnetic head
摘要 The method of producing a thin film magnetic head is capable of flattening a surface of a hard bias film without badly influencing a read-element. The method comprises the steps of: forming a magnetoresistance effect film on a wafer substrate; forming a resist layer, at a position corresponding to a read-element of the thin film magnetic head, on the magnetoresistance effect film; forming the read-element by removing a part of the magnetoresistance effect film which is exposed from the resist layer; forming an insulating film so as to coat side faces of the read-element; forming a hard bias film on the insulating film by sputtering; and etching a surface of the hard bias film by ion beam etching so as to flatten the surface thereof.
申请公布号 US2008026326(A1) 申请公布日期 2008.01.31
申请号 US20060542565 申请日期 2006.10.03
申请人 FUJITSU LIMITED 发明人 AKIE MASANORI
分类号 G03C5/00 主分类号 G03C5/00
代理机构 代理人
主权项
地址