| 摘要 |
An apparatus for manufacturing a flat panel display is provided to spray air to a substrate in various directions to dry a cleaning solution effectively to prevent spots by removing a cleaning solution, thereby improving the yield of a process. An apparatus for manufacturing a flat panel display includes a process chamber(100), a transferring part(200) transferring a substrate in and out of the process chamber, and a nozzle part(300) arranged in the process chamber and including arc-shaped upper and lower air knives(310) for spraying air to the transferred substrate. The upper air knife spraying air to an upper side of the substrate and the lower air knife spraying air to the back of the substrate are separated from each other vertically. |
