| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sheet-form substrate separating device which automatically separates a sheet-form substrate grown on a growth substrate from the growth substrate, and to provide a sheet-form substrate separating method for separating the sheet-form substrate from the growth substrate. <P>SOLUTION: The sheet-form substrate separating device 1 comprises a substrate 3 for growth for growing a sheet-form silicon substrate, a vacuum suction pad 11 for separating the sheet-form substrate, and a Bernoulli's suction pad 13 for conveying the sheet-form substrate. The substrate 3 for growth comprises a first surface, a second surface and a third surface which grows the sheet-form silicon substrate by gripping the substrate 3 for growth. The vacuum suction pad 11 is positioned in the distance not longer than one third of length extending from one end side in which the second surface is positioned in the growth substrate to the other end side opposed to the second surface such that a part of the grown sheet-form silicon substrate is sucked. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
