INTERFERENCE LIGHT MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an interference light measuring device with wide measurement wavelength range and measurement dynamic range capable of measuring coherent light efficiently with high accuracy. SOLUTION: This interference light measuring device 10 comprises a device 12 which generates signal light L2 and reference light L1 and generates interference light L3 by making both light interfering each other, and a light receiving device 13 which has a plurality of light receiving elements arranged to the interference fringes of the interference light L3 with a predetermined relation on a light receiving surface and receives the interference light L3 emitted on the light receiving surface. The beam widths of the signal light L2 and the reference light L2 emitted onto the light receiving surface of the light receiving device 13 is set smaller than the size of the light receiving surface of the light receiving elements 13. COPYRIGHT: (C)2008,JPO&INPIT