A detection system is described (100) for detecting luminescence sites on a substrate (6). The detection system (100) typically comprises an irradiation unit (102) for generating at least one excitation irradiation beam for exciting luminescence sites on the substrate (6). The at least one excitation irradiation beam may be a plurality of excitation irradiation beams. The detection system (100) also comprises a first optical element, e.g. refractive element (25), adapted for receiving at least two irradiation beams of different wavelengths or wavelength ranges, the at least two irradiation beams being excitation irradiation beam(s) to be focused on a substrate and/or luminescence irradiation beam(s) to be collected from the excited luminescence sites on the substrate (6). The detection system (100) also comprises an optical compensator for adjusting at least one of the at least two irradiation beams of different wavelengths or wavelength ranges so as to reduce or compensate for optical aberrations. The present invention also relates to a corresponding method for detecting, a phase plate and a method for designing such a phase plate.
申请公布号
WO2008012706(A2)
申请公布日期
2008.01.31
申请号
WO2007IB52634
申请日期
2007.07.05
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;VAN DIJK, ERIK, M., H., P.;BOAMFA, MARIUS, I.;WIMBERGER-FRIEDL, REINHOLD
发明人
VAN DIJK, ERIK, M., H., P.;BOAMFA, MARIUS, I.;WIMBERGER-FRIEDL, REINHOLD