METHOD FOR PREPARING THIN FILM TRANSISTOR, THIN FILM TRANSISTOR PREPARED BY THE METHOD, AND LIQUID CRYSTAL DISPLAY DEVICE HAVING THE SAME

摘要

A method for manufacturing thin film transistors, thin film transistors manufactured by the same, and a liquid crystal display device having the same are provided to form photoresist patterns and form a copper layer in the photoresist patterns to prevent agglomeration of photoresist residue and gate drain shortage by the dispersion of copper. A substrate(210) is prepared. A photoresist layer is formed on the substrate. The photoresist layer is patterned to form photoresist patterns. A lower barrier layer is formed on the substrate in the photoresist patterns. A copper layer is formed on the lower barrier layer in the photoresist patterns. An upper barrier layer is formed on the copper layer in the photoresist patterns. The photoresist patterns are removed to form a gate electrode(201) formed of the lower barrier layer, the copper layer, and the upper barrier layer.