METHOD FOR FORMING MICRO-LENS AND IMAGE SENSOR COMPRISING MICRO-LENS AND METHOD FOR MANUFACTURING THE SAME

摘要

A method of forming a micro lens and an image sensor including the micro lens and a manufacturing method thereof are provided to reduce a dead zone in case of forming the micro lens in such a way of adding a second shell unit to a first shell unit. A method of forming a micro lens(MLa) includes the steps of: forming a silicon pattern on a semiconductor substrate(SUB) having a lower structure; forming a capping film on the substrate to cover the silicon pattern; transforming the silicon pattern into a pole type polysilicon pattern, and the capping film into a round-type shell unit by annealing the silicon pattern and the capping film; and filling the shell unit with a lens material(F) through an opening unit between the circumference of the shell unit and the substrate.