发明名称 |
METHOD FOR PRODUCING SILICON |
摘要 |
<p>There is provided a silicon production method which comprises producing semiconductor grade silicon while producing solar grade silicon by converting a portion of trichlorosilane into silicon for solar cells. There is also provided an industrially advantageous method that removes contaminants from a chlorosilane circulating system which produces trichlorosilane in producing silicon from trichlorosilane by a vapor deposition method.</p> |
申请公布号 |
EP1882675(A1) |
申请公布日期 |
2008.01.30 |
申请号 |
EP20060732655 |
申请日期 |
2006.05.15 |
申请人 |
TOKUYAMA CORPORATION |
发明人 |
WAKAMATSU, SATORU;ODA, HIROYUKI |
分类号 |
C01B33/03;C01B33/035;H01L31/04 |
主分类号 |
C01B33/03 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|