发明名称 LATTICE-MISMATCHED SEMICONDUCTOR STRUCTURES WITH REDUCED DISLOCATION DEFECT DENSITIES AND RELATED METHODS FOR DEVICE FABRICATION
摘要 Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.
申请公布号 EP1882268(A2) 申请公布日期 2008.01.30
申请号 EP20060770525 申请日期 2006.05.17
申请人 AMBERWAVE SYSTEMS CORPORATION 发明人 CHENG, ZHIYUAN;CURRIE, MATTHEW, T.;LOCHTEFELD, ANTHONY J.;FIORENZA, JAMES;LANGDO, THOMAS A.;BRAITHWAITE, GLYN
分类号 H01L21/20;H01L21/762;H01L21/8258;H01L29/66;H01L29/78 主分类号 H01L21/20
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