发明名称 Photo-sensitive MEMS structure
摘要 A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.
申请公布号 US7324323(B2) 申请公布日期 2008.01.29
申请号 US20050036438 申请日期 2005.01.13
申请人 LUCENT TECHNOLOGIES INC. 发明人 AKSYUK VLADIMIR ANATOLYEVICH;SIMON MARIA ELINA;SLUSHER RICHART ELLIOTT
分类号 H01G5/00 主分类号 H01G5/00
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