| 发明名称 |
Process for precise arrangement of micro-bodies |
| 摘要 |
A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots. |
| 申请公布号 |
US7323227(B2) |
申请公布日期 |
2008.01.29 |
| 申请号 |
US20060349985 |
申请日期 |
2006.02.09 |
| 申请人 |
JAPAN AS REPRESENTED BY DIRECTOR GENERAL OF NATIONAL RESEARCH INSTITUTE OF METALS |
发明人 |
FUDOJI HIROSHI;KONNO TAKESHI;EGASHIRA MITSURU;KOBAYASHI MIKIHIKO;SHINYA NORIO |
| 分类号 |
B05D1/04;H05K3/34;B01J19/08;G01N37/00;G02F1/1339;H01L21/48;H01L21/98;H01L23/12 |
主分类号 |
B05D1/04 |
| 代理机构 |
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代理人 |
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