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发明名称
SUBSTRATE PROCESSING UNIT
摘要
申请公布号
KR100798659(B1)
申请公布日期
2008.01.29
申请号
KR20020020704
申请日期
2002.04.16
申请人
发明人
分类号
B05C9/14;H01L21/00;B05C13/02;G03F7/16;G03F7/30;H01L21/027;H01L21/677;(IPC1-7):H01L21/00
主分类号
B05C9/14
代理机构
代理人
主权项
地址
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