发明名称 |
A METHOD AND SYSTEM FOR MODIFYING A GATE DIELECTRIC STACK CONTAINING A HIGH-K LAYER USING PLASMA PROCESSING |
摘要 |
A method and system for modifying a gate dielectric stack (1) by exposure to a plasma. The method includes providing the gate dielectric stack (1) having a high-k layer (30) formed on a substrate (10, 125), generating a plasma from a process gas containing an inert gas and one of an oxygen-containing gas or a nitrogen-containing gas, where the process gas pressure is selected to control the amount of neutral radicals relative to the amount of ionic radicals in the plasma, and modifying the gate dielectric stack (1) by exposing the stack (1) to the plasma.
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申请公布号 |
KR20080009675(A) |
申请公布日期 |
2008.01.29 |
申请号 |
KR20077003092 |
申请日期 |
2005.08.11 |
申请人 |
TOKYO ELECTRON LIMITED;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
NIIMI HIROAKI;COLOMBO LUIGI;SHIMOMURA KOJI;SUGAWARA TAKUYA;MATSUDO TATSUO |
分类号 |
H01L21/314;H01L21/28;H01L21/31;H01L21/316 |
主分类号 |
H01L21/314 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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