| 摘要 |
A substrate is supported on a plurality of substrate supporting pins mounted to a second movable member. Next, so as to bring the plurality of substrate supporting pins close to a plurality of substrate supporting pins mounted to a first movable member, the first movable member and second movable member are moved, respectively. After this, with the substrate being supported between the substrate supporting pins, the first movable member and the second movable member are reversed. Then, the first movable member and the second movable member are moved relative to each other such that the respective plurality of substrate supporting pins are spaced apart from one another.
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