Semiconductor optical modulator integrated resistor for impedance matching using semiconductor doped layer and method of fabricating the same

摘要

Provided is a semiconductor optical modulator device in which a resistor for impedance matching is integrated in a device in order to improve performance and to reduce cost during the fabrication of an ultra high speed optical modulator module. A doped layer in an epitaxial layer of the optical modulator device is used as a resistor for impedance matching. According to this method, it is possible to more easily realize an optical device compared with optical device fabrication processes in which additional resistors are used in the outside and the inside of the device for impedance matching.