| 摘要 |
A thin-film piezoelectric element has a substrate, a lower electrode, a piezoelectric portion, and an upper electrode that are sequentially formed on the substrate. The piezoelectric portion has a dielectric thin film that has an alkali niobium oxide-based perovskite structure expressed by general formula (Na<SUB>x</SUB>K<SUB>y</SUB>Li<SUB>z</SUB>)NbO<SUB>3 </SUB>(0<x<1, 0<y<1, 0<=z<1, x+y+z=1), and a high voltage-withstand dielectric that has a dielectric strength voltage greater than that of the dielectric thin film.
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