Microwave displacement measurement system for an electrodynamic direct drive

摘要

An electrodynamic direct drive includes an armature that travels within a housing and a drive system for moving armature in relation to housing. The drive system has two drive means, that are moved in relation to each other in the form of a coil system with at least one coil and a magnet system with at least one permanent magnet to move a load driver coupled with the armature. A displacement measurement space is defined by an end face of the armature and walls of the housing and/or the surface of the internally placed drive means. A sensor detects position of the armature within the housing by electromagnetic waves. The distance of the armature from the sensor is measured on the basis of the transit time of electromagnetic waves.