Surfactants for use in supercritical carbon dioxide, method for improving the efficiency of cleaning of the various microelectronic structures with carbon dioxide fluid,申请号KR20050076103-传众专利搜索

发明名称	Surfactants for use in supercritical carbon dioxide, method for improving the efficiency of cleaning of the various microelectronic structures with carbon dioxide fluid
摘要
申请公布号	KR100798363(B1)	申请公布日期	2008.01.28
申请号	KR20050076103	申请日期	2005.08.19
申请人		发明人
分类号	C11D1/00;C11D1/86	主分类号	C11D1/00
代理机构		代理人
主权项
地址

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