| 摘要 |
A sensor having a sensing pole for measuring the mass of a substance is provided to convert measured change of resonance frequency into the mass of a substance accurately by measuring a difference in the resonance frequency depending on variation of the stiffness by substances attached thereto. A sensor(100) for measuring the mass of a substance comprises a plate-like membrane(110), a sensing pole(120), a piezoelectric material(130), a protective layer, a cover, and a hydrophilic layer. The membrane has a predetermined diameter(a) and a thickness(h). The sensing pole, extending to have a predetermined height(H), has one side attached to the center of the membrane and the other side where objective substances for measuring are attached. The piezoelectric material is deposited on a position having the biggest stress on the membrane. The sensitivity of the sensor is proportional to the diameter of the membrane and reciprocally proportional to the height of the sensing pole. The protective layer is disposed on the deposition of the piezoelectric material and the upper surface of the membrane. The cover is disposed on the upper surface of the membrane. The hydrophilic layer is disposed on the surface having the sensing pole.
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