发明名称 Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
摘要 The present invention provides a high yield pathway for the fabrication, transfer and assembly of high quality printable semiconductor elements having selected physical dimensions, shapes, compositions and spatial orientations. The compositions and methods of the present invention provide high precision registered transfer and integration of arrays of microsized and/or nanosized semiconductor structures onto substrates, including large area substrates and/or flexible substrates. In addition, the present invention provides methods of making printable semiconductor elements from low cost bulk materials, such as bulk silicon wafers, and smart-materials processing strategies that enable a versatile and commercially attractive printing-based fabrication platform for making a broad range of functional semiconductor devices.
申请公布号 KR100798431(B1) 申请公布日期 2008.01.28
申请号 KR20060050058 申请日期 2006.06.02
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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