发明名称 |
A METHOD OF CHARACTERISING THE TRANSMISSION LOSSES OF AN OPTICAL SYSTEM |
摘要 |
<p>The illumination profile of a radiation beam is initially measured using a CCD detector. A reference mirror is then placed in the focal plane of the high aperture lens and the reflected radiation measured. By comparing the illumination profile and the detected radiation it is possible to determine the transmission losses for S and P polarisation which can then be used in scatterometry modeling.</p> |
申请公布号 |
SG138557(A1) |
申请公布日期 |
2008.01.28 |
申请号 |
SG20070043516 |
申请日期 |
2007.06.13 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DEN BOEF, ARIE JEFFREY;CORBEIJ, WILHELMUS MARIA;DUSA, MIRCEA;VAN KRAAIJ, MARKUS GERARDUS MARTINUS |
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