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发明名称
Silicon Ingot Growing Apparatus
摘要
申请公布号
KR100797585(B1)
申请公布日期
2008.01.28
申请号
KR20050124088
申请日期
2005.12.15
申请人
发明人
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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