PROBE BEAM MOLD FOR REPAIRING PROBE BEAM OF PROBE CARD AND PROBE REPAIR SYSTEM USING THE SAME

摘要

A probe beam mold for repairing a probe card and a probe repair system using the same are provided to easily replace a damaged probe beam by a new probe beam by using a transparent substrate and a fusing beam. A probe beam mold includes a guide plate(200) having at least one slot(210) corresponding to a pitch of a probe beam and receiving a repair probe beam, and a transparent substrate(230) attached to a front surface of the guide plate, through which a beam for fusing the repair probe beam passes. The guide plate includes a silicon substrate, and the transparent plate includes at least one of a glass substrate and a quartz substrate.