| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam scanner capable of operation at a high speed. SOLUTION: The beam scanner has an airtight vessel; an inlet window for transmitting a laser beam by airtightly blocking an opening formed in the wall of the vessel; a shaft introduced from the outside of the vessel to the inside of the vessel by penetrating the wall of the vessel; a bearing for rotatably supporting the shaft around the center axis of the shaft in the vessel; a drive part arranged on the outside of the vessel and for generating torque on the shaft; a reflecting mirror for changing the attitude by rotation of the shaft and reflecting the laser beam introduced from the inlet window; an emission opening for emitting the laser beam reflected with the reflective mirror out of the vessel; and an evacuation device for evacuating the inside of the vessel. COPYRIGHT: (C)2008,JPO&INPIT
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