| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing device which efficiently detects errors in the drawing device causing defects even if a memory has a small limited capacity, and also to provide an error detection method of the drawing device. SOLUTION: The electronic beam drawing device 1 has: a data generation circuit 43 for generating control data to control an electron beam optical system 200 based on drawing data; and a data processing circuit 45 for processing control data for outputting. The data processing circuit 45 has: a memory for storing inputted control data; and a control section for selectively storing control data on a peripheral region including the position of defects in a memory, based on the defect data obtained by a defect inspection machine. COPYRIGHT: (C)2008,JPO&INPIT
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