| 摘要 |
PROBLEM TO BE SOLVED: To provide a ZnO transparent conductive film that is superior in characteristics such as crystallinity with small residual ability, transparency, and conductivity through restraint of physical damage at the time of manufacturing of the ZnO film, and to provide a manufacturing method of the same that is low cost and highly efficient. SOLUTION: The ZnO transparent conductive film is constituted, by doping together aluminum and fluorine with the ZnO as main material. The ZnO transparent conductive film can be formed on a substrate, by providing a mesh-like grid electrode between an anode arranging the substrate and a cathode arranging the ZnO containing Al<SB>2</SB>O<SB>3</SB>and ZnF<SB>2</SB>as a target, and impressing high-frequency power on the cathode. COPYRIGHT: (C)2008,JPO&INPIT
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