| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection method capable of more efficiently performing the visual inspection of a substrate, and a visual inspection system. SOLUTION: In the visual inspection method for performing the inspection of the substrate while irradiating the substrate, which is held on a substrate supporting part 4, with the light emitted from a light source, the substrate supporting part 4 is arranged under the feed surface of a substrate feed device 6 for feeding the substrate and, in a stage that the substrate is fed to the region above the substrate supporting part 4 is moved upward while the substrate is scooped up to be supported on the substrate supporting part 4. In a stage that the substrate supported on the substrate supporting part 4 is inspected, the substrate supporting part 4 is returned to the original position to return the substrate to the feed surface of the substrate feed device 6. COPYRIGHT: (C)2008,JPO&INPIT
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