HIGH PRECISION POSTURE CONTROL METHOD OF X-RAY MIRROR

摘要

[PROBLEMS] To provide a high precision posture control method of an X-ray mirror in which the posture of a super-high-precision X-ray mirror or an X-ray optical element for collecting X-rays, from hard X-rays to soft X-rays, or altering the optical paths of X-rays, especially, the incident angles of X-rays can be sustained constantly at 1 µrad or less. [MEANS FOR SOLVING PROBLEMS]A longitudinal condensation mirror (5) and a lateral condensation mirror, each having a condensation plane band (7) consisting of an elliptical reflective surface having focal points at a light source (O) and a condensation point (F), are arranged perpendicularly to each other to form a K-B mirror arrangement. Fresnel mirrors are respectively constituted of a pair of planar reflective surfaces (9, 10) formed in the vicinities of the incident side end and the exit side end of the condensation plane band of each condensation mirror. Interference fringe (13) by the Fresnel mirror of each condensation mirror is independently monitored at a position insusceptible to a condensation beam by the condensation plane band, and variation in interference fringe is detected electrically and its detection signal is used as a feedback signal for posture control of each condensation mirror.