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发明名称
Verfahren zur Herstellung eines Bauteils mit einer kleineren periodischen Struktur als einer Wellenlänge sichtbaren Lichts und daraus gebildetes optisches Element
摘要
申请公布号
DE60313686(T2)
申请公布日期
2008.01.24
申请号
DE2003613686T
申请日期
2003.02.21
申请人
CANON K.K.
发明人
SAKAMOTO, JUNICHI
分类号
G02B5/18;G02B5/28;C03B13/10;C03B23/203;G02B5/30
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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